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Description: The LEP300 laser endpoint detector provides a real-time process control capability for a wide range of dry etch applications including semiconductors, optoelectronics, MEMS, failure analysis and general thin film removal. It offers in-situ monitoring solutions with excellent noise rejection and reduced set-up costs for both production and R&D environments. The system includes a user-friendly Windows™-based environment for input, control and visualisation. It calculates the etch rate and etch depth in real time enabling enhanced control of process termination.
Benfits
The LEP300 enables dry etch users to decrease process development time and manufacturing costs and increase yield and product performance.
This unit has the following features:
Dry etch process control and endpoint
Real-time,in-situ measurement
Integration to etch tool controller for automatic operation
Fast data acquisition with high noise rejection for accurate termination
User-friendly,Windows ® driven interface
Predictive modelling software, reducing material waste
Data reprocessing capability to speed up process optimisation
Remote control for thru-wall cleanroom implementation
Wavelength scanning for in-situ thickness measurement
Applications
The LEP300 is a flexible product suitable for both R&D and volume manufacturing environments.
It is also suitable across a wide range of materials and industries, including:
Materials
GaAs, AlGaAs, InGaAs, InGaAsP
InP, AlAs, GaN, GaP
Si, SiO2, SiN
metals…..and many more.
Products / End Uses
Optoelectronics: Lasers, LEDS, VCSELS
High Speed Electronics: T-gates, isolation etch
MEMS: Deep Si etch, waveguides, microchannels, cantilevers
Failure Analysis: Oxide, nitride, metal removal
This unit has the following specifications:
Optical Head Wavelength: 670 nm
XY Positioning: Manual
Vision System: Black and white monitor
For additional information, click here.
For a User's Manual, click here.
For more photos of this unit, click here.
Retail price for this unit is $35,643
Includes everything pictured.
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