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Description: The ATS100 series motor-driven linear stages provide the high resolution and repeatability required for semiconductor wafer testing and fabrication, automated microscope inspection systems, and precision micromachining applications. The stages are setup in an X-Y-Z configuration.
Each stage has the following specifications:
Total Travel: 100 mm (4 in)
Drive System: Precision Ground Ball Screw
Resolution: 2 mm/rev lead 0.5 µ m (20 µ in) @ 4000 steps/rev Motor Resolution
Maximum Travel Speed: 100 mm/s (4 in/s)
Maximum Load
Horizontal: 25.0 kg (55.1 lb)
Vertical: 10.0 kg (22.0 lb)
Side: 10.0 kg (22.0 lb)
Accuracy:
HAL ±0.5 µm (±20 µin)
Standard ±3.0µm (±120 µin)
Repeatability (Bidirectional)
HAL: ± 0.3 µm (±12 µin)
Standard: ± 0.7 µm (±30 µin)
Straightness and Flatness
Differential
HAL: 1.0 µm/25 mm (40 µin/in)
Standard: 2.0 µm/25 mm (80 µin/in)
Maximum Deviation
HAL ± 1.0 µm (±40 µin)
Standard ±2.0 µm (±80 µin)
Pitch and Yaw: 8 arc sec
The X, Y, and Z stages have 101SMC2N-HM motor drives installed.
Each stage assembly has an Aerotech HDZ1 English right angle L-bracket installed.
The left and the right stage are sold separately.
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