Description: The NanoMax-TS™ six-axis stage provides an unmatched combination of high stability and high resolution in a six-axis positioner. Major improvements in performance, functionality, and robustness have been achieved from the patented parallel flexure design. Modular actuators are easily and quickly mounted to the stage at ergonomically sited locations. Stepper motor, differential micrometer, and thumbscrew drives are all available. Any combination of these drives can be used on any axis of the stage. Rapid, ultraprecise motion can be achieved by combining long-travel actuators with either internal or external piezoelectric actuators.
The 17 MAX 601 units have the following specifications:
Travel:
Fine thread:
x, y, z axes: 4 mm
roll, pitch, yaw axes: 6 degrees
Differential:
x, y, z axes: 300 micrometers
roll, pitch, yaw axis: 18 arc minutes
Piezoactuator
x, y, z axes: 30 micrometers
roll, pitch, yaw axis: 1.8 arc minutes
Resolution:
Fine thread:
x, y, z axes: 1 micrometer
roll, pitch, yaw axis: 4 arc seconds
Differential:
x, y, z axes: 50 nanometers
roll, pitch, yaw axis: 0.3 arc second
Piezoactuator:
x, y, z axes: 30 nanometers
roll, pitch, yaw axis: 0.1 arc seconds
Piezoactuator with feedback:
x, y, z axes: 7 nanometers
Repeatability: 70 nanometers rms
Piezoelectric Pushing Force: 375 N maximum
Load Capacity: 1 kg (2.2 lbs)
Stiffness at Point P: 1 N/micrometers in x and z, 0.5 N/micrometers in y
Vacuum Compatibility: > 10-4 Pa maximum
Piezoelectric Drive Voltage: 0 to 75 Vdc
Weight: 6 kg (13.2 lb)
Platform size: 70 mm x 60 mm
We currently have on Right and one Left Handed stage available.
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